검색결과 : 7건
| No. | Article |
|---|---|
| 1 |
An experimental and numerical study of particle nucleation and growth during low-pressure thermal decomposition of silane Nijhawan S, McMurry PH, Swihart MT, Suh SM, Girshick SL, Campbell SA, Brockmann JE Journal of Aerosol Science, 34(6), 691, 2003 |
| 2 |
Numerical modeling of gas-phase nucleation and particle growth during chemical vapor deposition of silicon Girshick SL, Swihart MT, Suh SM, Mahajan MR, Nijhawan S Journal of the Electrochemical Society, 147(6), 2303, 2000 |
| 3 |
Particle transport in a parallel-plate semiconductor reactor: Chamber modification and design criterion for enhanced process cleanliness Nijhawan S, McMurry PH, Campbell SA Journal of Vacuum Science & Technology A, 18(5), 2198, 2000 |
| 4 |
Investigation of particle generation during the low-pressure chemical vapor deposition of borophosphosilicate glass films Rao NP, Nijhawan S, Kim T, Wu Z, Campbell S, Kittelson D, McMurry P, Cheng CC, Mastromatteo E Journal of the Electrochemical Society, 145(6), 2051, 1998 |
| 5 |
Investigation of particle formation during the plasma enhanced chemical vapor deposition of amorphous silicon, oxide, and nitride films Rao NP, Wu Z, Nijhawan S, Ziemann P, Campbell S, Kittelson DB, McMurry P Journal of Vacuum Science & Technology B, 16(2), 483, 1998 |
| 6 |
Particle-Beam Mass-Spectrometer Measurements of Particle Formation During Low-Pressure Chemical-Vapor-Deposition of Polysilicon and SiO2-Films Mcmurry PH, Nijhawan S, Rao N, Ziemann P, Kittelson DB, Campbell S Journal of Vacuum Science & Technology A, 14(2), 582, 1996 |
| 7 |
Calculate the Solubility of Aromatics Yaws CL, Bu L, Nijhawan S Chemical Engineering, 102(2), 113, 1995 |