검색결과 : 1건
No. | Article |
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1 |
New Broad-Beam Gas Ion-Source for Industrial Application Gavrilov NV, Mesyats GA, Nikulin SP, Radkovskii GV, Elkind A, Perry AJ, Treglio JR Journal of Vacuum Science & Technology A, 14(3), 1050, 1996 |
No. | Article |
---|---|
1 |
New Broad-Beam Gas Ion-Source for Industrial Application Gavrilov NV, Mesyats GA, Nikulin SP, Radkovskii GV, Elkind A, Perry AJ, Treglio JR Journal of Vacuum Science & Technology A, 14(3), 1050, 1996 |