검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Challenges in etch: What's new? Gottscho RA, Nojiri K, LaCara J Thin Solid Films, 516(11), 3493, 2008 |
| 2 |
Anisotropic etching of RuO2 and Ru with high aspect ratio for gigabit dynamic random access memory Yunogami T, Nojiri K Journal of Vacuum Science & Technology B, 18(4), 1911, 2000 |
| 3 |
High-Rate and Highly Selective Anisotropic Etching for WSix/Poly-Si Using Electron-Cyclotron-Resonance Plasma Nojiri K, Tsunokuni K, Yamazaki K Journal of Vacuum Science & Technology B, 14(3), 1791, 1996 |
| 4 |
Electron-Cyclotron-Resonance Plasma-Etching of Silicon Dioxide for Deep-Submicron Ultralarge Scale Integrations Nojiri K, Iguchi E Journal of Vacuum Science & Technology B, 13(4), 1451, 1995 |