화학공학소재연구정보센터
검색결과 : 7건
No. Article
1 Analysis and metrology with a focused helium ion beam
Sijbrandij S, Notte J, Scipioni L, Huynh C, Sanford C
Journal of Vacuum Science & Technology B, 28(1), 73, 2010
2 Analysis of subsurface beam spread and its impact on the image resolution of the helium ion microscope
Sijbrandij S, Notte J, Sanford C, Hill R
Journal of Vacuum Science & Technology B, 28(6), C6F6, 2010
3 Gas field ion source and liquid metal ion source charged particle material interaction study for semiconductor nanomachining applications
Tan SD, Livengood R, Shima D, Notte J, McVey S
Journal of Vacuum Science & Technology B, 28(6), C6F15, 2010
4 Subsurface damage from helium ions as a function of dose, beam energy, and dose rate
Livengood R, Tan S, Greenzweig Y, Notte J, McVey S
Journal of Vacuum Science & Technology B, 27(6), 3244, 2009
5 Understanding imaging modes in the helium ion microscope
Scipioni L, Sanford CA, Notte J, Thompson B, McVey S
Journal of Vacuum Science & Technology B, 27(6), 3250, 2009
6 Elemental analysis with the helium ion microscope
Sijbrandij S, Thompson B, Notte J, Ward BW, Economou NP
Journal of Vacuum Science & Technology B, 26(6), 2103, 2008
7 Membrane folding by helium ion implantation for three-dimensional device fabrication
Arora WJ, Sijbrandij S, Stern L, Notte J, Smith HI, Barbastathis G
Journal of Vacuum Science & Technology B, 25(6), 2184, 2007