검색결과 : 7건
No. | Article |
---|---|
1 |
Analysis and metrology with a focused helium ion beam Sijbrandij S, Notte J, Scipioni L, Huynh C, Sanford C Journal of Vacuum Science & Technology B, 28(1), 73, 2010 |
2 |
Analysis of subsurface beam spread and its impact on the image resolution of the helium ion microscope Sijbrandij S, Notte J, Sanford C, Hill R Journal of Vacuum Science & Technology B, 28(6), C6F6, 2010 |
3 |
Gas field ion source and liquid metal ion source charged particle material interaction study for semiconductor nanomachining applications Tan SD, Livengood R, Shima D, Notte J, McVey S Journal of Vacuum Science & Technology B, 28(6), C6F15, 2010 |
4 |
Subsurface damage from helium ions as a function of dose, beam energy, and dose rate Livengood R, Tan S, Greenzweig Y, Notte J, McVey S Journal of Vacuum Science & Technology B, 27(6), 3244, 2009 |
5 |
Understanding imaging modes in the helium ion microscope Scipioni L, Sanford CA, Notte J, Thompson B, McVey S Journal of Vacuum Science & Technology B, 27(6), 3250, 2009 |
6 |
Elemental analysis with the helium ion microscope Sijbrandij S, Thompson B, Notte J, Ward BW, Economou NP Journal of Vacuum Science & Technology B, 26(6), 2103, 2008 |
7 |
Membrane folding by helium ion implantation for three-dimensional device fabrication Arora WJ, Sijbrandij S, Stern L, Notte J, Smith HI, Barbastathis G Journal of Vacuum Science & Technology B, 25(6), 2184, 2007 |