검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Coherent diffraction lithography: Periodic patterns via mask-based interference lithography Fucetola CP, Patel AA, Moon EE, O'Reilly TB, Smith HI Journal of Vacuum Science & Technology B, 27(6), 2947, 2009 |
| 2 |
Photoresist characterization using double exposures with interference lithography O'Reilly TB, Smith HI Journal of Vacuum Science & Technology B, 26(1), 128, 2008 |
| 3 |
Linewidth uniformity in Lloyd's mirror interference lithography systems O'Reilly TB, Smith HI Journal of Vacuum Science & Technology B, 26(6), 2131, 2008 |