검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Edge Roughness of a 200-nm Pitch Resist Pattern Fabricated by Ion Projection Lithography Brunger WH, Blaschke J, Torkler M, Buchmann LM Journal of Vacuum Science & Technology B, 11(6), 2404, 1993 |
| No. | Article |
|---|---|
| 1 |
Edge Roughness of a 200-nm Pitch Resist Pattern Fabricated by Ion Projection Lithography Brunger WH, Blaschke J, Torkler M, Buchmann LM Journal of Vacuum Science & Technology B, 11(6), 2404, 1993 |