검색결과 : 1건
No. | Article |
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1 |
Study of excess silicon at Si3N4 thermal SiO2 interface using ellipsometric measurements Gritsenko VA, Svitasheva SN, Petrenko IP, Wong H, Xu JB, Wilson IH Journal of the Electrochemical Society, 146(2), 780, 1999 |
No. | Article |
---|---|
1 |
Study of excess silicon at Si3N4 thermal SiO2 interface using ellipsometric measurements Gritsenko VA, Svitasheva SN, Petrenko IP, Wong H, Xu JB, Wilson IH Journal of the Electrochemical Society, 146(2), 780, 1999 |