검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
EUCLIDES: European EUVL program Benschop JPH, van Dijsseldonk AJJ, Kaiser WM, Ockwell DC Journal of Vacuum Science & Technology B, 17(6), 2978, 1999 |
| 2 |
Synchrotron light as a source for extreme ultraviolet lithography Ockwell DC, Crosland NCE, Kempson VC Journal of Vacuum Science & Technology B, 17(6), 3043, 1999 |