검색결과 : 1건
No. | Article |
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1 |
Resolution Limits in Electron-Beam-Induced Tungsten Deposition Kohlmannvonplaten KT, Chlebek J, Weiss M, Reimer K, Oertel H, Brunger WH Journal of Vacuum Science & Technology B, 11(6), 2219, 1993 |
No. | Article |
---|---|
1 |
Resolution Limits in Electron-Beam-Induced Tungsten Deposition Kohlmannvonplaten KT, Chlebek J, Weiss M, Reimer K, Oertel H, Brunger WH Journal of Vacuum Science & Technology B, 11(6), 2219, 1993 |