검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Mechanism of Cu oxidation in ashing process Kojima A, Sakai T, Ohiwa T Journal of Vacuum Science & Technology B, 22(6), 2611, 2004 |
| 2 |
Impact of Reactive Ion Etching Induced Carbon Contamination on Oxidation of Silicon Tsuchiaki M, Kvitek RJ, Parks C, Murphy RJ, Ohiwa T, Watanabe T Journal of the Electrochemical Society, 143(7), 2378, 1996 |
| 3 |
Impact of Reduced Resist Thickness on Deep-Ultraviolet Lithography Azuma T, Ohiwa T, Okumura K, Farrell T, Nunes R, Dobuzinsky D, Fichtl G, Gutmann A Journal of Vacuum Science & Technology B, 14(6), 4246, 1996 |