검색결과 : 1건
No. | Article |
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1 |
Generation of Large-Area Disk-Shaped ECR Plasma for Diamond Deposition Murai A, Ohya I, Yasui T, Tahara H, Yoshikawa T Thin Solid Films, 281-282, 146, 1996 |
No. | Article |
---|---|
1 |
Generation of Large-Area Disk-Shaped ECR Plasma for Diamond Deposition Murai A, Ohya I, Yasui T, Tahara H, Yoshikawa T Thin Solid Films, 281-282, 146, 1996 |