검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Establishment of very uniform gas-flow pattern in the process chamber for microwave-excited high-density plasma by ceramic shower plate Goto T, Inokuchi A, Ishibashi K, Yasuda S, Nakanishi T, Kohno M, Okesaku M, Sasaki M, Nozawa T, Hirayama M, Ohmi T Journal of Vacuum Science & Technology A, 27(4), 686, 2009 |