검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Electrical characterisation of thin silicon oxynitride films deposited by low pressure chemical vapour deposition Hajji B, Temple-Boyer P, Olivie F, Martinez A Thin Solid Films, 354(1-2), 9, 1999 |
| No. | Article |
|---|---|
| 1 |
Electrical characterisation of thin silicon oxynitride films deposited by low pressure chemical vapour deposition Hajji B, Temple-Boyer P, Olivie F, Martinez A Thin Solid Films, 354(1-2), 9, 1999 |