검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Dual exposure glass layer suspended structures: A simplified fabrication process for suspended nanostructures on planar substrates Tanenbaum DM, Olkhovets A, Sekaric L Journal of Vacuum Science & Technology B, 19(6), 2829, 2001 |
| 2 |
Charge induced pattern distortion in low energy electron beam lithography Satyalakshmi KM, Olkhovets A, Metzler MG, Harnett CK, Tanenbaum DM, Craighead HG Journal of Vacuum Science & Technology B, 18(6), 3122, 2000 |
| 3 |
Actuation and internal friction of torsional nanomechanical silicon resonators Olkhovets A, Evoy S, Carr DW, Parpia JM, Craighead HG Journal of Vacuum Science & Technology B, 18(6), 3549, 2000 |
| 4 |
Low voltage electron beam lithography in PMMA Olkhovets A, Craighead HG Journal of Vacuum Science & Technology B, 17(4), 1366, 1999 |