화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Primary Reaction Channels and Kinetics of the Thermal-Decomposition of Phenylsilane
Oneal HE, Ring MA, Kim D, King KD
Journal of Physical Chemistry, 99(23), 9397, 1995
2 Mechanism of the Thermal-Decomposition of Ethylsilane
Jardine RE, Oneal HE, Ring MA, Beatie ME
Journal of Physical Chemistry, 99(33), 12507, 1995
3 Mechanisms of Silicon Dioxide Deposition from the Low-Pressure Chemical-Vapor-Deposition of Diethylsilane Oxygen Mixtures
Martin JG, Oneal HE, Ring MA, Roberts DA, Hochberg AK
Journal of the Electrochemical Society, 142(11), 3873, 1995