화학공학소재연구정보센터
검색결과 : 5건
No. Article
1 Replacement fin processing for III-V on Si: From FinFets to nanowires
Waldron N, Merckling C, Teugels L, Ong P, Sebaai F, Barla K, Collaert N, Thean VY
Solid-State Electronics, 115, 81, 2016
2 Use of Multifunctional Carboxylic Acids and Hydrogen Peroxide To Improve Surface Quality and Minimize Phosphine Evolution During Chemical Mechanical Polishing of Indium Phosphide Surfaces
Matovu JB, Ong P, Leunissen LHA, Krishnan S, Babu SV
Industrial & Engineering Chemistry Research, 52(31), 10664, 2013
3 Chemical Mechanical Polishing of Ge Using Colloidal Silica Particles and H2O2
Peddeti S, Ong P, Leunissen LHA, Babu SV
Electrochemical and Solid State Letters, 14(7), H254, 2011
4 Smooth and high quality epitaxial strained Ge grown on SiGe strain relaxed buffers with 70-85% Ge
Loo R, Souriau L, Ong P, Kenis K, Rip J, Storck P, Buschhardt T, Vorderwestner M
Journal of Crystal Growth, 324(1), 15, 2011
5 Fabrication of high quality Ge virtual substrates by selective epitaxial growth in shallow trench isolated Si (001) trenches
Wang G, Loo R, Takeuchi S, Souriau L, Lin JC, Moussa A, Bender H, De Jaeger B, Ong P, Lee W, Meuris M, Caymax M, Vandervorst W, Blanpain B, Heyns MM
Thin Solid Films, 518(9), 2538, 2010