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| No. | Article |
|---|---|
| 1 |
Electron-Beam Block Exposure System for a 256-M Dynamic Random-Access Memory Sakamoto K, Fueki S, Yamazaki S, Abe T, Kobayashi K, Nishino H, Satoh T, Takemoto A, Ookura A, Oono M, Sago S, Oae Y, Yamada A, Yasuda H Journal of Vacuum Science & Technology B, 11(6), 2357, 1993 |