검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Development of catalytic chemical vapor deposition apparatus for large size substrates Osono S, Kitazoe M, Tsuboi H, Asari S, Saito K Thin Solid Films, 501(1-2), 61, 2006 |
| 2 |
A layer-by-layer Cat-CVD of conformal and stoichiometric silicon nitride with in-situ H-2 post-treatment Kitazoe M, Osono S, Itoh H, Asari S, Saito K, Hayama M Thin Solid Films, 501(1-2), 160, 2006 |
| 3 |
Coverage properties of silicon nitride film prepared by the Cat-CVD method Osono S, Uchiyama Y, Kitazoe M, Saito K, Hayama M, Masuda A, Izumi A, Matsumura H Thin Solid Films, 430(1-2), 165, 2003 |