검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Physical properties of an oxide photoresist film for submicron pattern lithography Chiang D, Chang CM, Chen SW, Yang CT, Hsueh WJ Thin Solid Films, 542, 409, 2013 |
| 2 |
Analysis of amine contamination on silicon oxide surfaces using ToF-SIMS Lu D, Mo ZQ, Xing ZX, Gui D Applied Surface Science, 233(1-4), 352, 2004 |