검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
고온 열순환 공정이 BCB와 PECVD 산화규소막 계면의 본딩 결합력에 미치는 영향에 대한 연구 권용재, 석종원, Lu JQ, Cale TS, Gutmann RJ Korean Chemical Engineering Research, 46(2), 389, 2008 |
| 2 |
Investigation of Low-Temperature SiO2 Plasma-Enhanced Chemical-Vapor-Deposition Deshmukh SC, Aydil ES Journal of Vacuum Science & Technology B, 14(2), 738, 1996 |
| 3 |
Investigation of SiO2 Plasma-Enhanced Chemical-Vapor-Deposition Through Tetraethoxysilane Using Attenuated Total-Reflection Fourier-Transform Infrared-Spectroscopy Deshmukh SC, Aydil ES Journal of Vacuum Science & Technology A, 13(5), 2355, 1995 |