검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Interpretation of Spectroscopic Ellipsometry Measurements of Ultrathin Dielectric Layers on Silicon - Impact of Accuracy of the Silicon Optical-Constants Tonova D, Depas M, Vanhellemont J Thin Solid Films, 288(1-2), 64, 1996 |
| 2 |
The Calculation of Thin-Film Parameters from Spectroscopic Ellipsometry Data Jellison GE Thin Solid Films, 290-291, 40, 1996 |