검색결과 : 1건
No. | Article |
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1 |
Effect of Process Parameters on Glow-Discharge and Film Thickness Uniformity in Facing Target Sputtering Nathan SS, Muralidhar GK, Rao GM, Mohan S Thin Solid Films, 292(1-2), 20, 1997 |
No. | Article |
---|---|
1 |
Effect of Process Parameters on Glow-Discharge and Film Thickness Uniformity in Facing Target Sputtering Nathan SS, Muralidhar GK, Rao GM, Mohan S Thin Solid Films, 292(1-2), 20, 1997 |