검색결과 : 1건
No. | Article |
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1 |
Experimental study of a radio-frequency Ionized Physical Vapour Deposition process: Contamination by the internal coil Imbert JC, de Poucques L, Boisse-Laporte C, Bretagne J, Hugon MC, Pagnon D, Pitach P, Teule-Gay L, Touzeau M Thin Solid Films, 516(15), 4700, 2008 |