검색결과 : 6건
| No. | Article |
|---|---|
| 1 |
Investigation of multiphase hydrogenation in a catalyst-trap microreactor McGovern S, Harish G, Pai CS, Mansfield W, Taylor JA, Pau S, Besser RS Journal of Chemical Technology and Biotechnology, 84(3), 382, 2009 |
| 2 |
3 omega thermal conductivity measurements of thin film dielectrics on silicon for use in cantilever-based IR imaging Jones CDW, Pardo F, Pai CS, Bower JE, Miner JF, Klemens FP, Cirelli RA, Ferry EJ, Taylor JA, Baker MR, Dennis BS, Mansfield WM, Kornblit A, Keller RC, Gates JV, Ramirez AP Journal of Vacuum Science & Technology B, 27(3), 1207, 2009 |
| 3 |
Nonorthogonal wafer dicing for waveguide, microelectromechanical systems, and nanotechnology applications Pau S, Taylor JA, Pai CS Journal of Vacuum Science & Technology B, 22(4), L15, 2004 |
| 4 |
Processing and characterization of ultralow-dielectric constant organosilicate Yang S, Pai JCH, Pai CS, Dabbagh G, Nalamasu O, Reichmanis E, Seputro J, Obeng YS Journal of Vacuum Science & Technology B, 19(6), 2155, 2001 |
| 5 |
Integration of fluorinated amorphous carbon as low-dielectric constant insulator: Effects of heating and deposition of tantalum nitride Chang JP, Krautter HW, Zhu W, Opila RL, Pai CS Journal of Vacuum Science & Technology A, 17(5), 2969, 1999 |
| 6 |
Multilayer Inorganic Antireflective System for Use in 248 nm Deep-Ultraviolet Lithography Cirelli RA, Weber GR, Kornblit A, Baker RM, Klemens FP, Demarco J, Pai CS Journal of Vacuum Science & Technology B, 14(6), 4229, 1996 |