검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Micromachined scanning proximal probes with integrated piezoresistive readout and bimetal actuator for high eigenmode operation Woszczyna M, Zawierucha P, Paletko P, Zielony M, Gotszalk T, Sarov Y, Ivanov T, Frank A, Zollner JP, Rangelow IW Journal of Vacuum Science & Technology B, 28(6), C6N12, 2010 |