검색결과 : 16건
| No. | Article |
|---|---|
| 1 |
Impact of metal etch residues on etch species density and uniformity Dictus D, Shamiryan D, Paraschiv V, Boullart W, De Gendt S, Vinckier C Journal of Vacuum Science & Technology B, 28(4), 789, 2010 |
| 2 |
SELECTIVE REMOVAL OF HIGH-K GATE DIELECTRICS Shamiryan D, Baklanov M, Claes M, Boullart W, Paraschiv V Chemical Engineering Communications, 196(12), 1475, 2009 |
| 3 |
Sulfonic acid-functionalized gold nanoparticles: A colloid-bound catalyst for soft lithographic application on self-assembled monolayers (vol 125, pg 4279, 2003) Li XM, Paraschiv V, Huskens J, Reinhoudt DN Journal of the American Chemical Society, 130(16), 5606, 2008 |
| 4 |
Using ellipsometry for assessment of TiN surface roughness after plasma etch Shamiryan D, Paraschiv V, Dictus D, Baklanov MR, Beckx S, Boullart W Journal of the Electrochemical Society, 155(2), H108, 2008 |
| 5 |
Profile control of novel non-Si gates using BCl3/N-2 plasma Shamiryan D, Paraschiv V, Eslava-Fernandez S, Demand M, Baklanov M, Beckx S, Boullart W Journal of Vacuum Science & Technology B, 25(3), 739, 2007 |
| 6 |
Influence of TaN gate electrode microstructure on its dry etch properties Shamiryan D, Paraschiv V, Tokei Z, Beckx S, Boullart W Electrochemical and Solid State Letters, 9(8), G272, 2006 |
| 7 |
Wet etch characteristics of hafnium silicate layers Claes M, Paraschiv V, Dictus D, Conard T, Delabie A, Van Elshocht S, Zhao C, Everaert JL, Boullart W, Vanhaelemeersch S, De Gendt S Journal of the Electrochemical Society, 153(4), F60, 2006 |
| 8 |
Influence of crystallographic orientation on dry etch properties of TiN Dictus D, Shamiryan D, Paraschiv V, Boullart W, De Gendt S, Vanhaelemeersch S Journal of Vacuum Science & Technology B, 24(5), 2472, 2006 |
| 9 |
Influence of different deposition conditions of top and bottom electrode on the reliability of Sr0.8Bi2.2Ta2O9 ferroelectric capacitors Goux L, Xu Z, Paraschiv V, Lisoni JG, Maes D, Haspeslagh L, Groeseneken G, Wouters DJ Solid-State Electronics, 50(7-8), 1227, 2006 |
| 10 |
Influence of dry-etch patterning of top electrode and SrBi2Ta2O9 on the properties of ferroelectric capacitors Goux L, Paraschiv V, Lisoni JG, Schwitters M, Maes D, Haspeslagh L, Wouters DJ, Casella P, Zambrano R Journal of the Electrochemical Society, 152(12), C865, 2005 |