검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Comparative ion yields by secondary ion mass spectrometry from microelectronic films Parks CC Journal of Vacuum Science & Technology A, 19(4), 1134, 2001 |
| 2 |
Secondary ion mass spectrometry of deep trench capacitors in dynamic random access memory Parks CC, Glawischnig H, Levy M, Stengl R, Dieseldorff C Journal of Vacuum Science & Technology A, 17(4), 1130, 1999 |
| 3 |
Secondary-Ion Mass-Spectrometry of a Copper Polyimide Thin-Film Packaging Technology Parks CC Journal of Vacuum Science & Technology A, 15(3), 1328, 1997 |