검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Impact of extension implant energy purity and angle on the electrical characteristics of a 65 nm device technology Gossmann HJL, Rubin L, Parrill T, Agarwal A Journal of Vacuum Science & Technology B, 24(4), 1705, 2006 |
| No. | Article |
|---|---|
| 1 |
Impact of extension implant energy purity and angle on the electrical characteristics of a 65 nm device technology Gossmann HJL, Rubin L, Parrill T, Agarwal A Journal of Vacuum Science & Technology B, 24(4), 1705, 2006 |