검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Production of energetic ions in plasma by ambipolar fields: Application to etching Park W, Tolmachev YN, Volynets VN, Pashkovskiy VG Journal of Vacuum Science & Technology A, 25(4), 726, 2007 |
| No. | Article |
|---|---|
| 1 |
Production of energetic ions in plasma by ambipolar fields: Application to etching Park W, Tolmachev YN, Volynets VN, Pashkovskiy VG Journal of Vacuum Science & Technology A, 25(4), 726, 2007 |