검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
In-line copper contamination monitoring using noncontact Q-VSPV techniques Boehringer M, Hauber J, Passefort S, Eason K Journal of the Electrochemical Society, 152(1), G1, 2005 |
| 2 |
In-line electrical metrology for high-K gate dielectrics deposited by atomic layer CVD De Witte H, Passefort S, Besling W, Maes JWH, Eason K, Young E, Rittersma ZM, Heyns M Journal of the Electrochemical Society, 150(9), F169, 2003 |