검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
On the impact of nanotopography of silicon wafers on post-chemical mechanical polished oxide layers Schmolke R, Deters R, Thieme P, Pech R, Schwenk H, Diakourakis G Journal of the Electrochemical Society, 149(4), G257, 2002 |