검색결과 : 6건
| No. | Article |
|---|---|
| 1 |
Improving pattern placement using through-the-membrane signal monitoring Perkins FK, Marrian CRK, Peckerar MC Journal of Vacuum Science & Technology B, 16(6), 3567, 1998 |
| 2 |
Novel technique for improving pattern placement in membrane mask making Perkins FK, Marrian CRK, Peckerar MC Journal of Vacuum Science & Technology B, 15(6), 2218, 1997 |
| 3 |
Modeling of Electron Elastic and Inelastic-Scattering Marrian CR, Perkins FK, Park D, Dobisz EA, Peckerar MC, Rhee KW, Bass R Journal of Vacuum Science & Technology B, 14(6), 3864, 1996 |
| 4 |
Proximity Correction Algorithms and a Co-Processor Based on Regularized Optimization .1. Description of the Algorithm Peckerar MC, Chang S, Marrian CR Journal of Vacuum Science & Technology B, 13(6), 2518, 1995 |
| 5 |
Effects of Etch Chemistry on SF6-Based Tungsten Etching by Electron-Cyclotron-Resonance Reactive Ion Etching Eddy CR, Kosakowski J, Shirey LM, Dobisz EA, Rhee KW, Chu W, Foster KW, Marrian CR, Peckerar MC Journal of Vacuum Science & Technology B, 12(6), 3351, 1994 |
| 6 |
Fabrication Using X-Ray Nanolithography and Measurement of Coulomb-Blockade in a Variable-Sized Quantum-Dot Burkhardt M, Smith HI, Antoniadis DA, Orlando TP, Melloch MR, Rhee KW, Peckerar MC Journal of Vacuum Science & Technology B, 12(6), 3611, 1994 |