화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 Formation of dendritic crystal structures in thin silicon films on silicon dioxide by carbon ion implantation and high intensity large area flash lamp irradiation
Voelskow M, Endler R, Schumann T, Mucklich A, Ou X, Liepack EH, Gebel T, Peeva A, Skorupa W
Journal of Crystal Growth, 388, 70, 2014
2 Physical Characterization of PECVD and PEALD Ru(-C) Films and Comparison with PVD Ruthenium Film Properties
Wojcik H, Junige M, Bartha W, Albert M, Neumann V, Merkel U, Peeva A, Gluch J, Menzel S, Munnik F, Liske R, Utess D, Richter I, Klein C, Engelmann HJ, Ho P, Hossbach C, Wenzel C
Journal of the Electrochemical Society, 159(2), H166, 2012
3 Rare-earth implanted Y2O3 thin films
Peeva A, Dikovska AO, Atanasov PA, de Castroc M, Skorupa W
Applied Surface Science, 253(19), 8165, 2007
4 High temperature-induced crystallization in tantalum pentoxide layers and its influence on the electrical properties
Atanassova E, Kalitzova A, Zollo G, Paskaleva A, Peeva A, Georgieva M, Vitali G
Thin Solid Films, 426(1-2), 191, 2003