검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Characterization of the etch rate non-uniformity in a magnetically enhanced reactive ion etcher Buie MJ, Pender JTP, Dahimene M Journal of Vacuum Science & Technology A, 16(3), 1464, 1998 |
| No. | Article |
|---|---|
| 1 |
Characterization of the etch rate non-uniformity in a magnetically enhanced reactive ion etcher Buie MJ, Pender JTP, Dahimene M Journal of Vacuum Science & Technology A, 16(3), 1464, 1998 |