검색결과 : 1건
No. | Article |
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1 |
An XPS and Thermogravimetric Study of Oxidized AlN and AlN-Si3N2 Layers Deposited by Liquid-Phase Chemical-Vapor-Deposition Perrem R, Henry F, Peraudeau G, Armas B, Berjoan R, Beche E Journal of Materials Science, 32(5), 1305, 1997 |