검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
High accuracy electron beam model development in MICHELLE: eBEAM Ovtchinnikov SG, Cooke SJ, Shtokhamer R, Vlasov AN, Mkrtchyan MM, Kostas C, Petillo JJ, Levush B Journal of Vacuum Science & Technology B, 28(6), C6J8, 2010 |
| 2 |
Application of a general electron emission equation to surface nonuniformity and current density variation Jensen KL, Petillo JJ, Montgomery EJ, Pan ZG, Feldman DW, O'Shea PG, Moody NA, Cahay M, Yater JE, Shaw JL Journal of Vacuum Science & Technology B, 26(2), 831, 2008 |
| 3 |
Global and Stochastic Space-Charge Effects in Ion-Beam Lithography Petillo JJ, Mondelli AA Journal of Vacuum Science & Technology B, 13(6), 2409, 1995 |
| 4 |
Novel Electrostatic Column for Ion Projection Lithography Chalupka A, Stengl G, Buschbeck H, Lammer G, Vonach H, Fischer R, Hammel E, Loschner H, Nowak R, Wolf P, Finkelstein W, Hill RW, Berry IL, Harriott LR, Melngailis J, Randall JN, Wolfe JC, Stroh H, Wollnik H, Mondelli AA, Petillo JJ, Leung K Journal of Vacuum Science & Technology B, 12(6), 3513, 1994 |