검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Studies on structural, electrical, compositional, and mechanical properties of WSix thin films produced by low-pressure chemical vapor deposition Santucci S, Lozzi L, Passacantando M, Picozzi P, Petricola P, Moccia G, Alfonsetti R, Diamanti R Journal of Vacuum Science & Technology A, 16(3), 1207, 1998 |