검색결과 : 1건
No. | Article |
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1 |
Chemical vapor deposition growth and properties of TaCxNy Engbrecht ER, Sun YM, Smith S, Pfiefer K, Bennett J, White JM, Ekerdt JG Thin Solid Films, 418(2), 145, 2002 |
No. | Article |
---|---|
1 |
Chemical vapor deposition growth and properties of TaCxNy Engbrecht ER, Sun YM, Smith S, Pfiefer K, Bennett J, White JM, Ekerdt JG Thin Solid Films, 418(2), 145, 2002 |