검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Correcting for global space charge by positive ion generation Crane T, Campbell C, Pickard D, Han LQ, Takahashi K, Meisburger WD, Pease RF Journal of Vacuum Science & Technology B, 20(6), 2709, 2002 |
| 2 |
Multicusp Sources for Ion-Beam Lithography Applications Leung KN, Herz P, Kunkel WB, Lee Y, Perkins L, Pickard D, Sarstedt M, Weber M, Williams MD Journal of Vacuum Science & Technology B, 13(6), 2600, 1995 |