검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Aluminium nitride-niobium multilayers and free-standing structures for MEMS Danylyuk SV, Ott R, Panaitov G, Pickartz G, Hollmann E, Vitusevich SA, Belyaev AE, Klein N Thin Solid Films, 515(2), 489, 2006 |
| No. | Article |
|---|---|
| 1 |
Aluminium nitride-niobium multilayers and free-standing structures for MEMS Danylyuk SV, Ott R, Panaitov G, Pickartz G, Hollmann E, Vitusevich SA, Belyaev AE, Klein N Thin Solid Films, 515(2), 489, 2006 |