검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Growth of aluminum nitride on flat and patterned Si (111) by high temperature halide CVD Chubarov M, Mercier F, Lay S, Charlot F, Crisci A, Coindeau S, Encinas T, Ferro G, Reboud R, Boichot R Thin Solid Films, 623, 65, 2017 |