검색결과 : 1건
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1 |
Influence of energetic bombardment on stress, resistivity, and microstructure of indium tin oxide films grown by radio frequency magnetron sputtering on flexible polyester substrates Carcia PF, McLean RS, Reilly MH, Li ZG, Pillione LJ, Messier RF Journal of Vacuum Science & Technology A, 21(3), 745, 2003 |