검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Quantitative analysis of trace metals in silicon nitride films by a vapor phase decomposition/solution collection approach Vereecke G, Schaekers M, Verstraete K, Arnauts S, Heyns MM, Plante W Journal of the Electrochemical Society, 147(4), 1499, 2000 |