검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Effects of Pressure and Electrode Length on the Abatement of N2O and CF4 in a Low-Pressure Plasma Reactor Hur M, Lee JO, Lee JY, Kang WS, Song YH Plasma Chemistry and Plasma Processing, 36(6), 1589, 2016 |
| No. | Article |
|---|---|
| 1 |
Effects of Pressure and Electrode Length on the Abatement of N2O and CF4 in a Low-Pressure Plasma Reactor Hur M, Lee JO, Lee JY, Kang WS, Song YH Plasma Chemistry and Plasma Processing, 36(6), 1589, 2016 |