검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Self-consistent charge-up simulation for the microscopic feature of SiO2 layer in rf capacitive discharge Lee SH, Lee JK, Jung SW, Kim DW, You SJ Current Applied Physics, 15(11), 1463, 2015 |
| No. | Article |
|---|---|
| 1 |
Self-consistent charge-up simulation for the microscopic feature of SiO2 layer in rf capacitive discharge Lee SH, Lee JK, Jung SW, Kim DW, You SJ Current Applied Physics, 15(11), 1463, 2015 |