검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Structural, optical and electrical properties of high-k ZrO2 dielectrics on Si prepared by plasma assisted pulsed laser deposition Zhang W, Cui Y, Hu ZG, Yu WL, Sun J, Xu N, Ying ZF, Wu JD Thin Solid Films, 520(20), 6361, 2012 |
| 2 |
Thermal stability of carbon nitride thin films prepared by electron cyclotron resonance plasma assisted pulsed laser deposition Dong ZB, Lu YF, Gao K, Shi LQ, Sun J, Xu N, Wu JD Thin Solid Films, 516(23), 8594, 2008 |
| 3 |
Effect of stored elastic energy on phase content of ion assisted deposited boron nitride films Hohage J, Pompe W Thin Solid Films, 515(4), 1767, 2006 |
| 4 |
Plasma-assisted pulsed laser deposition for the improvement of the film growth process De Giacomo A, Shakhatov VA, Senesi GS, De Pascale O, Prudenzano F Applied Surface Science, 186(1-4), 533, 2002 |