검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Precise Measurement of the Effective Backscatter Coefficient for 100-keV Electron-Beam Lithography on Si Watson GP, Berger SD, Liddle JA, Fetter LA, Farrow RC, Tarascon RG, Mkrtchyan M, Novembre AE, Blakey MI, Bolan KJ, Poli L Journal of Vacuum Science & Technology B, 13(6), 2535, 1995 |