검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
The effects of C on the low-temperature formation and the properties of the spin-on dielectric films used for sub-50 nm technology and beyond Lee WG Thin Solid Films, 520(7), 3003, 2012 |
| No. | Article |
|---|---|
| 1 |
The effects of C on the low-temperature formation and the properties of the spin-on dielectric films used for sub-50 nm technology and beyond Lee WG Thin Solid Films, 520(7), 3003, 2012 |