검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Modeling of the chemically assisted ion beam etching process: Application to the GaAs etching by Cl-2/Ar+ Elmonser L, Rhallabi A, Gaillard M, Landesman JP, Talneau A, Pommereau F, Bouadma N Journal of Vacuum Science & Technology A, 25(1), 126, 2007 |
| 2 |
Development of chemically assisted etching method for GaAs-based optoelectronic devices Gaillard M, Rhallabi A, Elmonser L, Talneau A, Pommereau F, Pagnod-Rossiaux P, Bouadma N Journal of Vacuum Science & Technology A, 23(2), 256, 2005 |
| 3 |
Chemically assisted ion beam etching of GaAs by argon and chlorine gases: Experimental and simulation investigations Rhallabi A, Gaillard M, Elmonser L, Marcos G, Talneau A, Pommereau F, Pagnod-Rossiaux P, Landesman JP, Bouadma N Journal of Vacuum Science & Technology B, 23(5), 1984, 2005 |