검색결과 : 1건
No. | Article |
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1 |
Failure Mechanisms of Anodized Aluminum Parts Used in Chemical-Vapor-Deposition Chambers Ponnekanti S, Murugesh L, Hanson E Journal of Vacuum Science & Technology A, 14(3), 1127, 1996 |
No. | Article |
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1 |
Failure Mechanisms of Anodized Aluminum Parts Used in Chemical-Vapor-Deposition Chambers Ponnekanti S, Murugesh L, Hanson E Journal of Vacuum Science & Technology A, 14(3), 1127, 1996 |